Paper
19 February 2014 High-order grating coupler for high-efficiency vertical to in-plane coupling
Author Affiliations +
Proceedings Volume 8995, High Contrast Metastructures III; 89950W (2014) https://doi.org/10.1117/12.2040317
Event: SPIE OPTO, 2014, San Francisco, California, United States
Abstract
We present here the design of a robust broadband high efficiency surface-normal vertical to in-plane optical coupler using fourth-order gratings. The fourth-order gratings can be designed such that the zero-order diffraction is suppressed while the diffraction efficiencies of the higher orders are enhanced for the in-plane coupling. We numerically demonstrated the surface normal incidence light coupling efficiency of 88.5% at 1,535 nm with a 3 dB bandwidth of 42 nm and 1dB bandwidth of 28 nm. Large fabrication tolerance of the fourth-order grating is also assessed.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Arvinder Singh Chadha, Yichen Shuai, and Weidong Zhou "High-order grating coupler for high-efficiency vertical to in-plane coupling", Proc. SPIE 8995, High Contrast Metastructures III, 89950W (19 February 2014); https://doi.org/10.1117/12.2040317
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Cited by 5 scholarly publications.
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KEYWORDS
Diffraction gratings

Waveguides

Diffraction

Optical design

Reflection

Silicon

Tolerancing

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