Laser-induced damage of CaF2 optics at 193 nm

Jue Wang; Gerald P. Cox; Keith J. Donohue; Ronald W. Davis; Ying Shi; Cody V. Cushman; Aram Rezikyan; Galan G. Moore; James E. Tingley; Keith J. Becken; Matthew Ross; Michael D. Thomas

doi:10.1117/12.2685720

24 November 2023 Laser-induced damage of CaF₂ optics at 193 nm

Jue Wang, Gerald P. Cox, Keith J. Donohue, Ronald W. Davis, Ying Shi, Cody V. Cushman, Aram Rezikyan, Galan G. Moore, James E. Tingley, Keith J. Becken, Matthew Ross, Michael D. Thomas

Author Affiliations +

Proceedings Volume 12726, Laser-Induced Damage in Optical Materials 2023; 127260G (2023) https://doi.org/10.1117/12.2685720
Event: SPIE Laser Damage, 2023, Dublin/Livermore, California, United States

Abstract

Laser-induced damage (LID) tests were conducted on CaF₂ optics at 193 nm using ISO S-on-1 method with the S varying from a standard 200 to 10³, 10⁴, and 10⁵ shots/site and fluences ranging from 0.1 J/cm² to 4.0 J/cm². Using a flat-top beam profile and a beam footprint of 250 μm × 250 μm, absorption-derived LID was observed on the standard 200-on-1 test. Defect-initiated LID was detected by increasing the pulse count with a reduced fluence. The absorption-driven LID was attribute to subsurface damage and two-photon absorption. The former was eliminated by using a FemtoFinish polishing process. The latter was experimentally determined by using laser calorimetric measurement. Improved crystal bulk and surface finishing quality were confirmed by X-ray diffraction and laser calorimetric measurement. Accelerated lifetime damage test (ALDT) was further conducted with an increased pulse count up to 10⁶ shots/site. The results confirm an enhanced lifespan prediction of the demanding laser optics.

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(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Jue Wang, Gerald P. Cox, Keith J. Donohue, Ronald W. Davis, Ying Shi, Cody V. Cushman, Aram Rezikyan, Galan G. Moore, James E. Tingley, Keith J. Becken, Matthew Ross, and Michael D. Thomas "Laser-induced damage of CaF₂ optics at 193 nm", Proc. SPIE 12726, Laser-Induced Damage in Optical Materials 2023, 127260G (24 November 2023); https://doi.org/10.1117/12.2685720

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