Analysis of common failure causes in oxide VCSELs

Yuqi Zhang; Jia Zhao

doi:10.1117/12.2628609

16 February 2022 Analysis of common failure causes in oxide VCSELs

Yuqi Zhang, Jia Zhao

Proceedings Volume 12164, International Conference on Optoelectronic Materials and Devices (ICOMD 2021); 121641H (2022) https://doi.org/10.1117/12.2628609
Event: 2021 International Conference on Optoelectronic Materials and Devices, 2021, Guangzhou, China

Abstract

Oxide Vertical Cavity Surface Emitting Lasers(VCSELs) are widely used in high-speed optical communication applications. An important specification for VCSELs is field reliability. However, oxide VCSELs are vulnerable to dislocation defect due to the inherent reasons of materials system and structural design. In order to better understand the failure modes and causes of oxide VCSELs, improve the reliability of the chip and reduce the failure rate, we summarize and analyze the most common failure modes, causes observed in oxide VCSELs from five aspects of materials system, structure design, manufactu

Citation Download Citation

Yuqi Zhang and Jia Zhao "Analysis of common failure causes in oxide VCSELs", Proc. SPIE 12164, International Conference on Optoelectronic Materials and Devices (ICOMD 2021), 121641H (16 February 2022); https://doi.org/10.1117/12.2628609

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