Enhanced cross-polarization efficiency of a-Si:H metasurfaces via chemical equilibrium in PE-CVD

Younghwan Yang; Gwanho Yoon; Sunghak Park; Seok Daniel Nangung; Ki Tae Nam; Junsuk Rho

doi:10.1117/12.2567588

20 August 2020 Enhanced cross-polarization efficiency of a-Si:H metasurfaces via chemical equilibrium in PE-CVD

Younghwan Yang, Gwanho Yoon, Sunghak Park, Seok Daniel Nangung, Ki Tae Nam, Junsuk Rho

Proceedings Volume 11467, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVII; 114672F (2020) https://doi.org/10.1117/12.2567588
Event: SPIE Nanoscience + Engineering, 2020, Online Only

Conference Poster

Abstract

This research reveals that the optical properties of hydrogenated a-Si can be modulated by varying chamber atmosphere of PE-CVD. When substrates temperature and chamber pressure were adjusted, the refractive index and the extinction coefficient was modulated. The highest refractive index at 450 nm is 4.3, and the lowest one is 2.6, which achieve 1.7 modulable indexes in the visible region. Also, this research provides lower than 0.1 extinction coefficient at the same wavelength. The lowest extinction coefficient can be applied to metasurfaces designs, and we propose 50%, and 85% conversion efficiency at 450 nm and 635 nm respectively. An experimental demonstration of these metasurfaces will be conducted.

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Younghwan Yang, Gwanho Yoon, Sunghak Park, Seok Daniel Nangung, Ki Tae Nam, and Junsuk Rho "Enhanced cross-polarization efficiency of a-Si:H metasurfaces via chemical equilibrium in PE-CVD", Proc. SPIE 11467, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVII, 114672F (20 August 2020); https://doi.org/10.1117/12.2567588

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