Partial coherence measurement for the illumination system in excimer laser lithography based on CCD image sensor

Pei Lu; Xiaoyong Liu; Qin Shi; Jianxin Shao; Yongcai Zhang; Zhenzhen Zheng

doi:10.1117/12.2547679

20 December 2019 Partial coherence measurement for the illumination system in excimer laser lithography based on CCD image sensor

Pei Lu, Xiaoyong Liu, Qin Shi, Jianxin Shao, Yongcai Zhang, Zhenzhen Zheng

Author Affiliations +

Proceedings Volume 11209, Eleventh International Conference on Information Optics and Photonics (CIOP 2019); 112091V (2019) https://doi.org/10.1117/12.2547679
Event: Eleventh International Conference on Information Optics and Photonics (CIOP 2019), 2019, Xi'an, China

Abstract

Partial coherence is one of the important parameters for evaluating the performance of lithographic tool. In this paper, we present a novel method of partial coherence measurement for the illumination system based on CCD image sensor. Partial coherence measurement can be performed by using a pinhole placed in the mask plane under different illumination system. We simulate the light source image of different illumination pupil distributions as well as the energy center by determining the gray value of spot. We show measurement values and measurement errors of partial coherence for illumination system. The statistics of the measurement results and the sensitivity analysis of the system indicate that measurement values and measurement errors of partial coherence satisfy the measurement requirement from our method in the wafer plane.

Citation Download Citation

Pei Lu, Xiaoyong Liu, Qin Shi, Jianxin Shao, Yongcai Zhang, and Zhenzhen Zheng "Partial coherence measurement for the illumination system in excimer laser lithography based on CCD image sensor", Proc. SPIE 11209, Eleventh International Conference on Information Optics and Photonics (CIOP 2019), 112091V (20 December 2019); https://doi.org/10.1117/12.2547679

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available