Scanning Photon And Scanning Electron Metrology On Photomasks

Robert H. J. Fastenau; Kevin M. Monahan; Barry J. Jennings; Martin J. Verheijen

doi:10.1117/12.953106

19 July 1989 Scanning Photon And Scanning Electron Metrology On Photomasks

Robert H. J. Fastenau, Kevin M. Monahan, Barry J. Jennings, Martin J. Verheijen

Proceedings Volume 1087, Integrated Circuit Metrology, Inspection, and Process Control III; (1989) https://doi.org/10.1117/12.953106
Event: 1989 Santa Clara Symposium on Microlithography, 1989, San Jose, CA, United States

Abstract

Resist and chromium features on electron beam generated photomasks ranging from 0.4 to 10. μm were measured with a classical scanning slit optical microscope, a confocal scanning laser microscope and a low -voltage scanning electron microscope. The scanning slit microscope was used in a calibrated way. The results obtained with those instruments are compared mutually and with the designed values. The accuracy of the measurements is evaluated using a model for electron beam exposure of resist in order to explain trends observed in the measurements. The results show that these systems can be used for mask metrology of sub -micron features with mutual differences of about 10 nm. The resolution limit of the optical systems appeared to be 0.4 μm.

Citation Download Citation

Robert H. J. Fastenau, Kevin M. Monahan, Barry J. Jennings, and Martin J. Verheijen "Scanning Photon And Scanning Electron Metrology On Photomasks", Proc. SPIE 1087, Integrated Circuit Metrology, Inspection, and Process Control III, (19 July 1989); https://doi.org/10.1117/12.953106

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available