Out-of-squareness measurement on ultra-precision machine based on the error separation

Tao Lai; Junfeng Liu; Shanyong Chen; Chaoliang Guan; Guipeng Tie; Quan Liao

doi:10.1117/12.2270171

26 June 2017 Out-of-squareness measurement on ultra-precision machine based on the error separation

Tao Lai, Junfeng Liu, Shanyong Chen, Chaoliang Guan, Guipeng Tie, Quan Liao

Proceedings Volume 10330, Modeling Aspects in Optical Metrology VI; 103301G (2017) https://doi.org/10.1117/12.2270171
Event: SPIE Optical Metrology, 2017, Munich, Germany

Abstract

Traditional methods of measuring out-of-squareness of ultra-precision motion stage have many limitations, especially the errors caused by inaccuracy of standard specimens, such as bare L-square and optical pentaprism. And generally, the accurate of out-of-squareness measurement is lower than the accurate of interior angles of standard specimens. Based on the error separation, this paper presents a novel method of out-of-squareness measurement with a polygon artifact. The angles bounded with the guideways and the edges of polygon artifact are measured, and the out-of-squareness distraction is achieved by the principle that the sum of internal the angles of a convex polygon artifact is (n-2)π. A out-of-squareness metrical experiment is carried out on the profilometer by using an optical square brick with the out-of-squareness of interior angles at about 1140.2 arcsec. The results show that the measurement accuracy of three out-of-squareness of the profilometer is not affected by the internal angles. The measurementwith the method can be applied to measure the machine error more accurate and calibrate the out-of-squareness of machine.

Citation Download Citation

Tao Lai, Junfeng Liu, Shanyong Chen, Chaoliang Guan, Guipeng Tie, and Quan Liao "Out-of-squareness measurement on ultra-precision machine based on the error separation", Proc. SPIE 10330, Modeling Aspects in Optical Metrology VI, 103301G (26 June 2017); https://doi.org/10.1117/12.2270171

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