Prof. Shanyong Chen Profile

Prof. Shanyong Chen

at National Univ of Defense Technology

SPIE Involvement:

Author

Publications (31)

Proceedings Article | 13 November 2024 Paper

An ultra-compact differential confocal sensor based on a system of metasurfaces

Zhicheng Zhao, Wenxiang Peng, Yang Ou, Yueqiang Hu, Shanyong Chen

Proceedings Volume 13280, 1328011 (2024) https://doi.org/10.1117/12.3048002

KEYWORDS: Confocal microscopy, Sensors, Dielectrics, Miniaturization, Silicon nitride, Design, Optical components, Finite-difference time-domain method, Ray tracing, Zemax

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Proceedings Article | 11 October 2024 Paper

Adaptive wavefront interferometry for large surface figure error utilizing convolutional neural networks

Linfeng Wang, Zikang Xie, Yunfeng Mao, Junfeng Liu, Shuai Xue, Shanyong Chen, Yifan Dai, Yong Liu

Proceedings Volume 13278, 132780Y (2024) https://doi.org/10.1117/12.3032728

KEYWORDS: Spatial light modulators, Education and training, Wavefronts, Wavefront errors, Interferometry, Wavefront aberrations, Optical surfaces, Interferometers, Convolutional neural networks, Mathematical optimization

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Proceedings Article | 30 April 2024 Paper

Three-dimensional reconstruction method by Fourier spectrum analysis-based white light interference scanning

Weiwei Chen, Shanyong Chen, Yupeng Xiong, Junfeng Liu

Proceedings Volume 13156, 131561F (2024) https://doi.org/10.1117/12.3018867

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Proceedings Article | 29 December 2023 Paper

Reference surface self-calibration stitching algorithm based on Legendre polynomials for testing synchrotron radiation flat mirrors

Yong Liu, Xibo Gao, Zubo Hu, Shuai Xue, Shanyong Chen, Cheng Huang, Chunyang Du, Hao Hu, Yifan Dai, Xiaoqiang Peng, Linfeng Wang

Proceedings Volume 12976, 1297625 (2023) https://doi.org/10.1117/12.3009617

KEYWORDS: Mirror surfaces, Mirrors, Calibration, Stitching interferometry, Simulations, Synchrotron radiation, X-rays, Photovoltaics, Light sources, Defense technologies

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Proceedings Article | 29 December 2023 Paper

A white light interferometry stitching measurement method based on feature extraction

Junren Chen, Shanyong Chen, Weiwei Chen, Junfeng Liu

Proceedings Volume 12976, 129761P (2023) https://doi.org/10.1117/12.3009483

KEYWORDS: Feature extraction, 3D image processing, Optical interferometry, Image registration, Interferometers, Reconstruction algorithms, Image processing, Point clouds, Vibration, Quartz

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Proceedings Article | 6 November 2023 Paper

Surface topography reconstruction method based on modulation of white light interference signal

Weiwei Chen, Yupeng Xiong, Shanyong Chen

Proceedings Volume 12921, 129214H (2023) https://doi.org/10.1117/12.2691822

KEYWORDS: Modulation, Optical path differences, Ferroelectric materials, Light sources, Interference (communication), Error analysis, Computer generated holography, Phase shifting, Interferograms, Defense technologies

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SPIE Journal Paper | 29 March 2023 Open Access

Design and simulation of a conformal optical window pair by the quasi-quantitative Schlieren measurement in a cylindrical isolator

Yang Ou, Yifan Dai, Shanyong Chen, Xiaoqiang Fan, Bing Xiong, Shangcheng Xu, Hao Hu, Yupeng Xiong, Yuepeng Yan, Chunyang Du, Wenxiang Peng, Chaoliang Guan

OE, Vol. 62, Issue 03, 035107, (March 2023) https://doi.org/10.1117/12.10.1117/1.OE.62.3.035107

KEYWORDS: Windows, Optical isolators, Design and modelling, Wavefront errors, Optical surfaces, Distortion, Optical engineering, Wavefront aberrations, Silica, Pipes

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Proceedings Article | 9 January 2023 Paper

High-resolution white light scanning stitching measurement of microstructure

Jingyang Guo, Dede Zhai, Shanyong Chen, Wenwen Lu

Proceedings Volume 12507, 125072U (2023) https://doi.org/10.1117/12.2656927

KEYWORDS: Edge detection, Spherical lenses, Interferometers, Microscopes, Computer generated holography, Optical testing, Motion measurement, Microscopy, Computer simulations, Optical interferometry

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With the development of ultra-precision machining technology, parts with microstructures on the surface are playing an increasingly important role in engineering practice. The scanning interference microscope measurement method is widely used in the measurement of microscopic surface topography. This paper proposes a method of interference microscopy combined with subaperture stitching. The first step is to divide and measure the sub-aperture. There is a partial overlap area between the divided adjacent subapertures. The white light interferometer measures each sub-aperture in turn. The second step is edge feature detection. There are highly steep edge features between the bottom of the groove and the surface of the surface microgroove. The stitching algorithm detects edge features by detecting the slope threshold of the sub-aperture. The third step is to correct the abscissa. Project the detected edge feature data onto the OXY plane to generate a 2D data set. The multi-dimensional motion scanning platform inevitably has motion errors in the measurement process, so the edge characteristic curves of adjacent sub-apertures have obvious lateral displacement in the overlapping area. The lateral displacement and angle of the lateral coordinate of each sub-aperture are corrected by the least square method. The fourth step is the height coordinate correction. The stitching algorithm minimizes the height difference between the corresponding points in the overlapping area, and solves it with a linear least squares problem model. We have completed the measurement of the fringe pattern on the computer-generated hologram (CGH) substrate and the complete topography of the long groove on the 10mm hemisphere. After the sub-aperture global iterative stitching algorithm, there is no stitching trace in the simulation result. For the long groove on the hemisphere, we designed a four-dimensional scanning motion platform and a special fixture to ensure that the long groove on the hemisphere rotates around an axis perpendicular to the geodesic line. The center of the white light interference fringe is always at the center of the long slot aperture.

Proceedings Article | 27 March 2022 Paper

High-resolution white light scanning stitching measurement of full-surface microstructure

Jingyang Guo, Dede Zhai, Shanyong Chen, Wenwen Lu

Proceedings Volume 12169, 12169BE (2022) https://doi.org/10.1117/12.2626853

KEYWORDS: Edge detection, Spherical lenses, Interferometers, Microscopes, Computer generated holography, Optical testing, Motion measurement, Microscopy, Computer simulations, Optical interferometry

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Proceedings Article | 13 December 2021 Paper

3D surface topography measurement of diffractive optical element based on white light interferometry stitching method

Wenwen Lu, Shanyong Chen, Jingyang Guo, Xu Wang, Weiwei Chen

Proceedings Volume 12072, 120720R (2021) https://doi.org/10.1117/12.2604523

KEYWORDS: 3D metrology, Diffractive optical elements, Optical components, Interferometers, Optical interferometry, Measurement devices, Defense technologies, Optical testing, Objectives, Cameras

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Proceedings Article | 5 November 2020 Paper

Review on the technology development of optical imaging system based on monolithic multisurface optics

Yupeng Xiong, Tiancong Luo, Yifan Dai, Shanyong Chen, Xiaoqiang Peng

Proceedings Volume 11567, 115671O (2020) https://doi.org/10.1117/12.2579474

KEYWORDS: Optics manufacturing, Imaging systems, Mirrors, Optical design, Optical imaging, Computer generated holography, Integrated optics, Telescopes

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Proceedings Article | 17 April 2020 Paper

Dual-band infrared optical system of common optical path with all-reflective folded structure

Yupeng Xiong, Yifan Dai, Shanyong Chen, Guipeng Tie, Sihua Xu, Yang Ou

Proceedings Volume 11455, 1145538 (2020) https://doi.org/10.1117/12.2564508

KEYWORDS: Infrared radiation, Thermography, Infrared imaging, Imaging systems, Infrared detectors, Optical design, Sensors, Monochromatic aberrations, Mirrors, Defense technologies

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Proceedings Article | 18 December 2019 Paper

Subaperture stitching testing of a half meter-class convex cylindrical surface with R/3

Lingwei Kong, Shanyong Chen, Shuai Xue, Ye Tian

Proceedings Volume 11341, 1134109 (2019) https://doi.org/10.1117/12.2539859

KEYWORDS: Computer generated holography, Mirrors, Optical alignment, Wavefronts, Optical testing, Stitching interferometry, Interferometers, Defense technologies, Laser systems engineering, Optics manufacturing

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Proceedings Article | 16 January 2019 Paper

Monolithic multi-surface concentric folded visible imaging system

Yupeng Xiong, Yifan Dai, Shanyong Chen, Guipeng Tie, Zhanbin Fan, Jianpeng Wang

Proceedings Volume 10838, 108381H (2019) https://doi.org/10.1117/12.2506326

KEYWORDS: Imaging systems, Mirrors, Optical design, Optical components, Diamond turning, Aspheric lenses, Reflectors, Sensors, Defense technologies, Reflection

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Proceedings Article | 16 January 2019 Paper

Interferometric test of optical free-form window

Chuanchao Wu, Shanyong Chen, Shuai Xue, Dede Zhai

Proceedings Volume 10838, 108381D (2019) https://doi.org/10.1117/12.2506124

KEYWORDS: Wavefronts, Interferometry, Optical analysis, Optical testing, Ray tracing, Collimation, Optical components, Modulation, Geometrical optics, Interferometers

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Proceedings Article | 24 April 2018 Paper

Thermal analysis for ion beam processing of the unimorph deformable mirror

Zhanbin Fan, Chaoliang Guan, Guipeng Tie, Shanyong Chen

Proceedings Volume 10712, 107121L (2018) https://doi.org/10.1117/12.2316952

KEYWORDS: Ion beams, Adhesives, Mirrors, Optical simulations, Temperature metrology, Ceramics, Synchrotron radiation, Deformable mirrors

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Proceedings Article | 24 October 2017 Paper

Characterization of the contribution of CGH fabrication error to measurement uncertainty in null test

Lin Hao, Shanyong Chen, Shuai Xue

Proceedings Volume 10460, 104601O (2017) https://doi.org/10.1117/12.2285550

KEYWORDS: Error analysis, Computer generated holography, Wavefronts

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Proceedings Article | 24 October 2017 Paper

Design on high-current pulsed electron beam modification and analysis of machining characteristics for spinel

Jinping Qiao, Guilin Wang, Shanyong Chen, Guipeng Tie

Proceedings Volume 10462, 104623P (2017) https://doi.org/10.1117/12.2285253

KEYWORDS: Electron beams, Spinel, Beam analyzers, Infrared radiation, Transmittance, Magnetorheological finishing

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Proceedings Article | 26 June 2017 Paper

Out-of-squareness measurement on ultra-precision machine based on the error separation

Tao Lai, Junfeng Liu, Shanyong Chen, Chaoliang Guan, Guipeng Tie, Quan Liao

Proceedings Volume 10330, 103301G (2017) https://doi.org/10.1117/12.2270171

KEYWORDS: Profilometers, Optical metrology, Systems modeling, Modeling, Motion measurement, Sensors, Optical testing, Calibration, Interferometers, Distance measurement, Error analysis, Defense technologies, Standards development, Prisms

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Proceedings Article | 28 October 2016 Paper

Influence of flexibility of polishing tool on the microscopic figure of spinel surface and optimal design

Zhi-ming Wu, Gui-lin Wang, Shan-yong Chen

Proceedings Volume 9683, 96830A (2016) https://doi.org/10.1117/12.2243291

KEYWORDS: Polishing, Spinel, Surface finishing, Surface roughness, Radium, Polyurethane, Diamond, Magnetorheological finishing, Infrared radiation, Domes

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Proceedings Article | 19 October 2016 Paper

Variable aberration generator using a high-order even aspheric singlet for testing optical surfaces

Jinfeng Lu, Shanyong Chen, Shuai Xue

Proceedings Volume 10155, 101550A (2016) https://doi.org/10.1117/12.2243814

KEYWORDS: Aspheric lenses, Optical testing, Aspheric optics, Singular optics, Metrology

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Proceedings Article | 27 September 2016 Paper

A new multi-probe scanning method for measuring optical surface

Dede Zhai, Ziqiang Yin, Shanyong Chen, Fujing Tian

Proceedings Volume 9684, 96841K (2016) https://doi.org/10.1117/12.2243800

KEYWORDS: Sensors, Error analysis, Metrology, Systems modeling, Mathematical modeling, Defense technologies, Motion measurement, 3D metrology, Autocollimators, Computer simulations

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Proceedings Article | 27 September 2016 Paper

Sub-aperture stitching test of a cylindrical mirror with large aperture

Shuai Xue, Shanyong Chen, Feng Shi, Jinfeng Lu

Proceedings Volume 9684, 96840C (2016) https://doi.org/10.1117/12.2242861

KEYWORDS: Mirrors, Computer generated holography, Optical testing, Diffraction, Wavefronts, Interferometers, Optical fabrication, Optical design, Algorithm development, Zemax

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SPIE Journal Paper | 23 May 2016

Interferometric characterization of geometric errors of ring cages for electrostatic suspension accelerometers

Jinfeng Lu, Shanyong Chen, Ziqiang Yin

OE, Vol. 55, Issue 05, 054105, (May 2016) https://doi.org/10.1117/12.10.1117/1.OE.55.5.054105

KEYWORDS: Retroreflectors, Wavefronts, Interferometry, Interferometers, Error analysis, Tolerancing, Glasses, Optical engineering, Photovoltaics, Modulation

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Proceedings Article | 11 August 2015 Paper

Interferometric cross test of a convex even asphere

Shuai Xue, Shanyong Chen, Liehua Zheng, Yepeng Li

Proceedings Volume 9524, 95244W (2015) https://doi.org/10.1117/12.2186166

KEYWORDS: Aspheric lenses, Interferometers, Aspheric optics, Calibration, Monochromatic aberrations, Interferometry, Computer generated holography, Optical testing, Lens design, Tolerancing

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Proceedings Article | 18 November 2014 Paper

Subaperture test of wavefront error of large telescopes: error sources and stitching performance simulations

Shanyong Chen, Shengyi Li, Guilin Wang

Proceedings Volume 9298, 929817 (2014) https://doi.org/10.1117/12.2070849

KEYWORDS: Wavefronts, Telescopes, Monochromatic aberrations, Device simulation, Space telescopes, Calibration, James Webb Space Telescope, Error analysis, Large telescopes, Interferometers

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The wavefront error of large telescopes requires to be measured to check the system quality and also estimate the misalignment of the telescope optics including the primary, the secondary and so on. It is usually realized by a focal plane interferometer and an autocollimator flat (ACF) of the same aperture with the telescope. However, it is challenging for meter class telescopes due to high cost and technological challenges in producing the large ACF. Subaperture test with a smaller ACF is hence proposed in combination with advanced stitching algorithms. Major error sources include the surface error of the ACF, misalignment of the ACF and measurement noises. Different error sources have different impacts on the wavefront error. Basically the surface error of the ACF behaves like systematic error and the astigmatism will be cumulated and enlarged if the azimuth of subapertures remains fixed. It is difficult to accurately calibrate the ACF because it suffers considerable deformation induced by gravity or mechanical clamping force. Therefore a selfcalibrated stitching algorithm is employed to separate the ACF surface error from the subaperture wavefront error. We suggest the ACF be rotated around the optical axis of the telescope for subaperture test. The algorithm is also able to correct the subaperture tip-tilt based on the overlapping consistency. Since all subaperture measurements are obtained in the same imaging plane, lateral shift of the subapertures is always known and the real overlapping points can be recognized in this plane. Therefore lateral positioning error of subapertures has no impact on the stitched wavefront. In contrast, the angular positioning error changes the azimuth of the ACF and finally changes the systematic error. We propose an angularly uneven layout of subapertures to minimize the stitching error, which is very different from our knowledge. At last, measurement noises could never be corrected but be suppressed by means of averaging and environmental control. We simulate the performance of the stitching algorithm dealing with surface error and misalignment of the ACF, and noise suppression, which provides guidelines to optomechanical design of the stitching test system.

Proceedings Article | 18 September 2014 Paper

Optomechanical design of near-null subaperture test system based on counter-rotating CGH plates

Yepeng Li, Shanyong Chen, Bing Song, Shengyi Li

Proceedings Volume 9282, 92820I (2014) https://doi.org/10.1117/12.2068330

KEYWORDS: Computer generated holography, Interferometers, Aspheric lenses, Monochromatic aberrations, Mirrors, Aspheric optics, Optical alignment, Tolerancing, Optical testing, Diffraction

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In off-axis subapertures of most convex aspheres, astigmatism and coma dominate the aberrations with approximately quadratic and linear increase as the off-axis distance increases. A pair of counter-rotating computer generated hologram (CGH) plates is proposed to generate variable amount of Zernike terms Z4 and Z6, correcting most of the astigmatism and coma for subapertures located at different positions on surfaces of various aspheric shapes. The residual subaperture aberrations are then reduced within the vertical range of measurement of the interferometer, which enables near-null test of aspheres flexibly. The alignment tolerances for the near-null optics are given with optomechanical analysis. Accordingly a novel design for mounting and aligning the CGH plates is proposed which employs three concentric rigid rings. The CGH plate is mounted in the inner ring which is supported by two couples of ball-end screws in connection with the middle ring. The CGH plate along with the inner ring is hence able to be translated in X-axis and tipped by adjusting the screws. Similarly the middle ring is able to be translated in Y-axis and tilted by another two couples of screws orthogonally arranged and connected to the outer ring. This design is featured by the large center-through hole, compact size and capability of four degrees-of-freedom alignment (lateral shift and tip-tilt). It reduces the height measured in the direction of optical axis as much as possible, which is particularly advantageous for near-null test of convex aspheres. The CGH mounts are then mounted on a pair of center-through tables realizing counter-rotation. Alignment of the interferometer, the CGHs, the tables and the test surface is also discussed with a reasonable layout of the whole test system. The interferometer and the near-null optics are translated by a three-axis stage while the test mirror is rotated and tilted by two rotary tables. Experimental results are finally given to show the near-null subaperture test capability of the system for a convex even asphere.

SPIE Journal Paper | 11 June 2012

Surface registration-based stitching of quasi-planar free-form wavefronts

Shanyong Chen, Yifan Dai, Shengyi Li, Feng Shi, Yanglin Peng

OE, Vol. 51, Issue 6, 063605, (June 2012) https://doi.org/10.1117/12.10.1117/1.OE.51.6.063605

KEYWORDS: Wavefronts, Interferometers, Optical engineering, Optical testing, Image registration, Distance measurement, Error analysis, Interferometry, Photovoltaics, Lithium

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SPIE Journal Paper | 1 January 2011

Stylus profilometry for steep aspheric surfaces with multisegment stitching

Yifan Dai, Shanyong Chen, Shengyi Li, Hao Hu, Qi Zhang

OE, Vol. 50, Issue 01, 013601, (January 2011) https://doi.org/10.1117/12.10.1117/1.3518072

KEYWORDS: Image segmentation, Aspheric lenses, Profilometers, Optical engineering, Algorithm development, Surface finishing, Mirrors, Interferometers, Precision optics, Aspheric optics

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SPIE Journal Paper | 1 February 2010

Calculation of subaperture aspheric departure in lattice design for subaperture stitching interferometry

Shanyong Chen, Yi-Fan Dai, Shengyi Li, Xiaoqiang Peng

OE, Vol. 49, Issue 02, 023601, (February 2010) https://doi.org/10.1117/12.10.1117/1.3314297

KEYWORDS: Aspheric lenses, Interferometers, Stitching interferometry, Optical engineering, Data modeling, Interferometry, Optical spheres, Zoom lenses, Lithium, Defense technologies

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Proceedings Article | 9 December 2005 Paper

An efficient iterative algorithm for subaperture stitching interferometry for aspheric surface

Shanyong Chen, Shengyi Li, Yifan Dai

Proceedings Volume 6024, 60241E (2005) https://doi.org/10.1117/12.666859

KEYWORDS: Aspheric lenses, Interferometers, Objectives, Tolerancing, Optimization (mathematics), Adaptive optics, Stitching interferometry, Computer aided design, Solid modeling, Optical spheres

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Showing 5 of 31 publications

Conference Committee Involvement (1)

International Conference on Optical and Photonic Engineering (PEN15)

14 April 2015 |

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