Multitype surface and thin film characterization using light scattering, scanning force microscopy, and white light interferometry

Angela Duparre; Gunther Notni

doi:10.1117/12.351662

19 July 1999 Multitype surface and thin film characterization using light scattering, scanning force microscopy, and white light interferometry

Angela Duparre, Gunther Notni

Author Affiliations +

Proceedings Volume 10294, Optical Metrology: A Critical Review; 102940E (1999) https://doi.org/10.1117/12.351662
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

The characterization of surface and thin film morphologies and roughnesses significantly benefits from appropriately utilizing different measuring techniques. When suitably combining light scattering measurements, scanning force microscopy, and white fight interferometry, comprehensive characterization over a wide range of sample types and roughness scales can be accomplished A concise overview on the characterization techniques is given, followed by examples of combined measurements. The presented results include a variety of samples such as superpolished and microrough substrates, thin film coatings for applications from the visible to the deep ultraviolet region, and rough engineering surfaces.

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Angela Duparre and Gunther Notni "Multitype surface and thin film characterization using light scattering, scanning force microscopy, and white light interferometry", Proc. SPIE 10294, Optical Metrology: A Critical Review, 102940E (19 July 1999); https://doi.org/10.1117/12.351662

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