Microtopography investigations of optical surfaces and thin films by light scattering, optical profilometry, and atomic force microscopy

Angela Duparre; Norbert Kaiser; Horst Truckenbrodt; Manfred R. Berger; Arno Kohler

doi:10.1117/12.162647

1 December 1993 Microtopography investigations of optical surfaces and thin films by light scattering, optical profilometry, and atomic-force microscopy

Angela Duparre, Norbert Kaiser, Horst Truckenbrodt, Manfred R. Berger, Arno Kohler

Author Affiliations +

Proceedings Volume 1995, Optical Scattering: Applications, Measurement, and Theory II; (1993) https://doi.org/10.1117/12.162647
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

The roughness of a number of uncoated glass substrates with different surface quality as well as surfaces of fluoride films is investigated by various characterization techniques. The influence of bandwidth limitation and the dependence on the examined sample area become obvious. The results obtained from the different measuring methods are shown to complement each other appropriately.

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Angela Duparre, Norbert Kaiser, Horst Truckenbrodt, Manfred R. Berger, and Arno Kohler "Microtopography investigations of optical surfaces and thin films by light scattering, optical profilometry, and atomic-force microscopy", Proc. SPIE 1995, Optical Scattering: Applications, Measurement, and Theory II, (1 December 1993); https://doi.org/10.1117/12.162647

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