Analysis of structure and control of the loop-locked ultra-precise 2D flexible hinge stage for optical measurement

Jianhuan Zhang; Xiaodong Yang; Lijun Zhang

doi:10.1117/12.783476

27 November 2007 Analysis of structure and control of the loop-locked ultra-precise 2D flexible hinge stage for optical measurement

Jianhuan Zhang, Xiaodong Yang, Lijun Zhang

Author Affiliations +

Proceedings Volume 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 672338 (2007) https://doi.org/10.1117/12.783476
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

Although PZT driving stage is a practical and widely used component in optical scanning measurement, its creep, hysteresis, poor long-term stability and the vibration of stage hindered the promotion in driving and positioning accuracy. Based on feedback control, the stage can have nanometer level driving accuracy. For attaching the displacement feedback sensor, a special structure that is called expanded hinge is designed. For getting higher sensitivity, a shallow groove is cut in it. In order to confirm the effect of the additional structure on the performance of the stage, the finite element software is employed, the analysis had been completed, and the simulated results are presented. With the vibration model of the 2D flexible hinge stage, the mathematic model of the vibration control can be achieved, and the PID control system is set up. After the sensors are carefully attached to the corresponding spot and the processing circuit is completed, the simulation and test of the overall performance of the stage can be executed.

Citation Download Citation

Jianhuan Zhang, Xiaodong Yang, and Lijun Zhang "Analysis of structure and control of the loop-locked ultra-precise 2D flexible hinge stage for optical measurement", Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 672338 (27 November 2007); https://doi.org/10.1117/12.783476

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available