Mr. Xiao-Dong Yang Profile

Xiao-Dong Yang

at Xiamen Univ

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Publications (2)

Proceedings Article | 27 November 2007 Paper

Study on the MEMS technique of flat capacitance sensor with double equipotential rings in ultra-precise optical measurement

Xiao-dong Yang, Jian-huan Zhang

Proceedings Volume 6827, 682727 (2007) https://doi.org/10.1117/12.756295

KEYWORDS: Sensors, Capacitance, Electrodes, Silicon, Microelectromechanical systems, Semiconducting wafers, Photoresist materials, Photomasks, Optical testing, Sputter deposition

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Proceedings Article | 27 November 2007 Paper

Analysis of structure and control of the loop-locked ultra-precise 2D flexible hinge stage for optical measurement

Jianhuan Zhang, Xiaodong Yang, Lijun Zhang

Proceedings Volume 6723, 672338 (2007) https://doi.org/10.1117/12.783476

KEYWORDS: Feedback control, Sensors, Ferroelectric materials, Control systems, Device simulation, Optical testing, Mathematical modeling, Resistance, Bridges, Optical scanning

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