This paper presents a linear-rotary micro-stage that can generate motions along and about the Z-axis using piezoelectric
elements (PZTs). The small stroke of a PZT is extended by repeating the PZT motions based on a mechanism of impact
friction drive. The friction drive mechanism has a simple driving unit, which only consists of a PZT element and a
friction element. The moving element of the stage, which is a steel cylinder, is supported and actuated by a driving unit,
which consists of two PZTs and a friction component made by permanent magnet. The magnetic force is employed for
holding the moving element and stabilizing the driving condition. The dimension of the stage is 7.0 mm × 8.8 mm × 7.5
mm. The moving ranges of the stage are about 5.0 mm in the Z-direction and 360 degrees in the θz-direction,
respectively. The maximum moving speeds are approximately 30 mm/s and 84 rpm in the two directions, respectively.
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