Yu Ni
at KLA China
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 26 May 2022 Poster + Paper
Shuang Xie, Dake Hu, Jeff Zhang, Xuewen Liu, Yu Ni, Lingyi Guo, Linfei Gao, Hajaj Eitan, Jincheng Pei, Jin Zhu, Kevin Huang
Proceedings Volume 12053, 120531X (2022) https://doi.org/10.1117/12.2613927
KEYWORDS: 3D metrology, Photovoltaics, Overlay metrology, 3D acquisition, Metrology, Optical parametric oscillators, Opacity, Semiconducting wafers, Virtual reality, Photomasks

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top