KEYWORDS: Digital video discs, Head, Microelectromechanical systems, Manufacturing, Modeling and simulation, 3D metrology, Measurement devices, Tolerancing, Sensors, SolidWorks
The measuring force of a micro/nano probe is an important factor affecting the probe measurement accuracy. The strength of the force largely depends on the nature of the suspension structure. How to improve the flexibility of the suspension structure is a difficult issue. To tackle the problem, this paper will put forwards an integrated suspension structure, which composed of three evenly spaced elastic hinges. Each elastic hinge has two beams, one of which is used to as the support. In measurement, the maximum displacement is occurred at the intersection of the two beams. In this paper, the flexibility of the suspension structure and probe measuring capability related to the elastic hinge's size and material are investigated based on theoretical modeling and simulation. The research result is significant to reduce the probe measuring force and improve its sensitivity.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.