Continuous polishing is a significant process to fabricate optical workpiece with nano figure precision. The figure of the optical workpiece is to a large extent dependent on the surface shape of the pitch lap. In this study, a novel method is proposed to determine the lap shape error by moving the measurement point in a generally radial direction while the lap rotates and correct the lap shape error by employing a small heat tool considering its viscoelastic property. It is validated that the surface shape error of the pitch lap can be corrected dramatically by the method, and the workpiece figure attempts to target the lap shape so as to reach a uniform material removal.
In the continuous polishing process, the deformation caused by the uneven temperature distribution inside the optical element seriously affects the processing accuracy. This article combines domestic and international studies on the heat deformation of optical elements, and the formula for calculating the heat deformation of optical elements is proposed. Based on the Ansys software, the heat deformation of the element is simulated and analyzed, and the accuracy of the formula is verified. The effects of different shapes, materials, thicknesses, temperature difference on the heat deformation of the optical element are analyzed. After the optical element is processed, the temperature surface measurement experiment is performed to obtain the change of the temperature and the surface figure of the optical element in the cooling process, which has guided significance for improving the continuous polishing temperature field.
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