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Dr. Xinxin Li
at Beihang Univ
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Publications (1)
Proceedings Article | 21 January 2022 Paper
Surface modification of single-crystal silicon by hybrid laser treatment
Xinxin Li, Zhiquan Cui, Yingchun Guan
Proceedings Volume 12154, 1215410 (2022) https://doi.org/10.1117/12.2626902
KEYWORDS: Picosecond lasers, Silicon, Semiconducting wafers, Picosecond phenomena, Surface roughness, Scanning electron microscopy, Resistance, Laser processing
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