Xiaohui Kang
at ASML Shanghai
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 20 March 2019 Paper
Proceedings Volume 10961, 109610O (2019) https://doi.org/10.1117/12.2515446
KEYWORDS: Computational lithography, Machine learning, Neural networks, Data modeling, Optical proximity correction, Lithography, Feature extraction, Convolution, Physics, Process modeling

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