Mr. Wen Chang Hsueh Profile

Wen Chang Hsueh

at Taiwan Semiconductor Manufacturing Co Ltd

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Author

Publications (2)

Proceedings Article | 9 September 2013 Paper

Implementable and systematic mitigation of native defects in EUV masks

Wen-Chang Hsueh, Li-Chih Yeh, Ming-Jiun Yao, Yun-Yue Lin, Jia-Jen Chen, Shin-Chang Lee, Anthony Yen

Proceedings Volume 8880, 88800Y (2013) https://doi.org/10.1117/12.2025786

KEYWORDS: Photomasks, Inspection, Extreme ultraviolet, Scanning electron microscopy, Semiconducting wafers, Extreme ultraviolet lithography, Atomic force microscopy, Fermium, Lithography, Frequency modulation

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Proceedings Article | 7 April 2011 Paper

Printability of buried mask defects in extreme UV lithography

Pei-Cheng Hsu, Ming-Jiun Yao, Wen-Chang Hsueh, Chia-Jen Chen, Shin-Chang Lee, Ching-Fang Yu, Luke Hsu, Sheng-Ji Chin, Jimmy Hu, Shu-Hao Chang, Chih-T'sung Shih, Yen-Cheng Lu, Timothy Wu, Shinn-Sheng Yu, Anthony Yen

Proceedings Volume 7969, 79691D (2011) https://doi.org/10.1117/12.881583

KEYWORDS: Photomasks, Extreme ultraviolet lithography, Inspection, Etching, Extreme ultraviolet, Manufacturing, Deposition processes, Defect inspection, Chromium, Lithography

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