Dr. Vladimir I. Ivakhnenko Profile

Dr. Vladimir I. Ivakhnenko

at KLA Massachusetts

SPIE Involvement:

Author

Publications (6)

Proceedings Article | 10 December 2001 Paper

Use of light scatter signals to identify particle material

John Stover, Vladimir Ivakhnenko, Yuri Eremin

Proceedings Volume 4449, (2001) https://doi.org/10.1117/12.450086

KEYWORDS: Particles, Silicon, Scanners, Spherical lenses, Light scattering, Calibration, Signal detection, Optical spheres, Semiconducting wafers, Sensors

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Proceedings Article | 10 December 2001 Paper

Effects of particle shape on particle identification and scatter predictions

Vladimir Ivakhnenko, John Stover, Craig Scheer, Yuri Eremin

Proceedings Volume 4449, (2001) https://doi.org/10.1117/12.450087

KEYWORDS: Particles, Scanners, Optical spheres, Calibration, Silicon, Semiconducting wafers, Copper, Light scattering, Spherical lenses, Laser scanners

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Proceedings Article | 29 March 1999 Paper

Modeled and measured scatter from vias

John Stover, Craig Scheer, Vladimir Ivakhnenko, Yuri Eremin, Natalia Grishina

Proceedings Volume 3619, (1999) https://doi.org/10.1117/12.343713

KEYWORDS: Data modeling, Defect detection, Dielectrics, Semiconductors, Oxides, Semiconducting wafers, Scattering, Scatter measurement, Light scattering, Dielectric polarization

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Proceedings Article | 1 April 1998 Paper

Comparison of models and measurements of scatter from surface-bound particles

Craig Scheer, John Stover, Vladimir Ivakhnenko

Proceedings Volume 3275, (1998) https://doi.org/10.1117/12.304395

KEYWORDS: Particles, Scatter measurement, Tungsten, Scattering, Bidirectional reflectance transmission function, Systems modeling, Spherical lenses, Polarization, Silicon, Semiconducting wafers

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Proceedings Article | 1 April 1998 Paper

Modeling of scatter from small pits of arbitrary shape

Vladimir Ivakhnenko, Craig Scheer, John Stover

Proceedings Volume 3275, (1998) https://doi.org/10.1117/12.304396

KEYWORDS: Scattering, Light scattering, Semiconducting wafers, Laser scattering, Mathematical modeling, Chemical elements, Computer simulations, Silicon, Particles, Refractive index

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Showing 5 of 6 publications

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