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Vinod Venkatesan
at KLA New York
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Publications (1)
Proceedings Article | 10 April 2013 Paper
Inspection of high-aspect ratio layers at sub 20nm node
Abhishek Vikram, Kuan Lin, Janay Camp, Sumanth Kini, Frank Jin, Vinod Venkatesan
Proceedings Volume 8681, 86811Q (2013) https://doi.org/10.1117/12.2011574
KEYWORDS: Inspection, Defect detection, Bridges, Semiconducting wafers, Front end of line, Image processing, Optical inspection, Etching, Defect inspection, Sensors
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