Prof. Viacheslav K. Samoylikov Profile

Prof. Viacheslav K. Samoylikov

at National Research University of Electronic Technology

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Author

Publications (4)

Proceedings Article | 31 January 2022 Paper

Designing thermal MEMS on a system level

S. Evstafyev, V. Samoylikov, S. Timoshenkov, P. Gornostaev

Proceedings Volume 12157, 121570M (2022) https://doi.org/10.1117/12.2619684

KEYWORDS: Actuators, Microactuators, Computer aided design, Microelectromechanical systems, Mirrors, Manufacturing, Mathematical modeling, Algorithm development, Structural design

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Proceedings Article | 31 January 2022 Paper

Investigation of the gas-phase deposition of material layers in plasma-vacuum systems for MEMS production processes

V. Samoylikov, S. Timoshenkov, S. Evstafyev

Proceedings Volume 12157, 121570L (2022) https://doi.org/10.1117/12.2619681

KEYWORDS: Silicon, Semiconducting wafers, Deposition processes, Microelectromechanical systems, Visualization, Mathematical modeling, Plasma, Analog electronics, Thermal effects

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Proceedings Article | 15 March 2019 Paper

Methods and means of experimental investigation of gas-phase deposition of material layers in MEMS processes

V. Samoylikov, S. Evstafyev

Proceedings Volume 11022, 110221S (2019) https://doi.org/10.1117/12.2520521

KEYWORDS: Deposition processes, Chemical vapor deposition, Microelectromechanical systems, Low pressure chemical vapor deposition, Visualization, Process modeling, Chemical analysis, Analog electronics, Doping, Visual process modeling

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Proceedings Article | 15 March 2019 Paper

Research and analysis of heat exchange processes of a micromechanical mirror based on a thermal microactuator

S. Evstafyev, V. Samoylikov

Proceedings Volume 11022, 110220U (2019) https://doi.org/10.1117/12.2520519

KEYWORDS: Mirrors, Microactuators, Analytical research, Micromirrors, Resistance, Silicon, Aluminum, Manufacturing, Semiconducting wafers

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