Dr. Vencent Chang Profile

Dr. Vencent Chang

at AZ Electronic Materials Taiwan Co Ltd

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Publications (1)

Proceedings Article | 31 March 2010 Paper

Accelerating the dual damascene process time by new filling material

Kung-Hsun Tsao, Yu-Huan Liu, Tsz-Yuan Chen, Chih-Jung Chen, C. Huang, Yung-Cheng Chang, Go Noya, Nick Hsiao, Simon Chiu, Vencent Chang, Tomohide Katayama, Hisashi Motobayashi

Proceedings Volume 7639, 76392A (2010) https://doi.org/10.1117/12.855997

KEYWORDS: Etching, Coating, Lithography, Optical lithography, Yield improvement, Semiconducting wafers, Absorption, Chemistry, Reflectivity, Natural surfaces

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