Aluminum mirrors were freshly fabricated under optimum conditions protected with MgF2 at various deposition rates
which evaporated by e-beam. All the samples were deposited on fine polished fused silica substrate. The reflectance
results were measured by Mcpherson Vuvas2000 spectrometer in DUV/VUV spectral region from 150nm to 350nm. The
highest reflectance is chosen to 210nm, and the point of 160nm is also very important for the project, so the results of
two points are detailed presented. The highest average reflectance is about 86.76% with the MgF2 deposition rate at
1.2nm/s. The effects of aging on the reflectance of the MgF2 protected aluminum mirrors are discussed.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.