Dr. Thomas E. Seidel Profile

Dr. Thomas E. Seidel

at Seitek50

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Publications (3)

Proceedings Article | 23 October 2015 Paper

Optical simulations for fractional fluorine terminated coatings on nanoimprint lithography masks

Thomas Seidel, Alexander Goldberg, Mathew Halls

Proceedings Volume 9635, 96350S (2015) https://doi.org/10.1117/12.2197371

KEYWORDS: Titanium dioxide, Photomasks, Optical coatings, Nanoimprint lithography, Silicon, Fluorine, Quartz, Refraction, Molecules, Optical simulations

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Proceedings Article | 28 March 2014 Paper

Fluorine coatings for nanoimprint lithography masks

Thomas Seidel, Alexander Goldberg, Mathew Halls

Proceedings Volume 9049, 90491S (2014) https://doi.org/10.1117/12.2057117

KEYWORDS: Fluorine, Atomic layer deposition, Photomasks, Nanoimprint lithography, Chemistry, Metals, Quartz, Head, Oxides, Silicon

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Proceedings Article | 1 January 1992 Paper

Learning opportunities through the use of cluster tools

Thomas Seidel, Michael Stark

Proceedings Volume 1594, (1992) https://doi.org/10.1117/12.56617

KEYWORDS: Semiconducting wafers, Process control, Chemical vapor deposition, Manufacturing, Etching, Metrology, Control systems, Contamination, Metals, Interfaces

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