Dr. Tadao Hashimoto
at SixPoint Materials Inc
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 1 February 2019 Presentation + Paper
Tadao Hashimoto, Edward Letts, Daryl Key, Benjamin Jordan, Eric Shang
Proceedings Volume 10926, 109261D (2019) https://doi.org/10.1117/12.2506059
KEYWORDS: Gallium nitride, Crystals, Semiconducting wafers, Oxygen, Surface finishing, Diffraction, Chemical mechanical planarization, X-ray diffraction

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