Steven L. Carson
Sr Principal Engineer
SPIE Involvement:
Conference Program Committee | Author
Publications (7)

Proceedings Article | 23 March 2021 Presentation + Paper
Proceedings Volume 11609, 116090L (2021) https://doi.org/10.1117/12.2588788

Proceedings Article | 18 March 2016 Open Access Paper
Proceedings Volume 9776, 977602 (2016) https://doi.org/10.1117/12.2225014
KEYWORDS: Extreme ultraviolet, Reticles, Pellicles, Photomasks, Semiconducting wafers, Extreme ultraviolet lithography, Scanners, Optical lithography, Inspection, Yield improvement

Proceedings Article | 8 April 2011 Paper
Proceedings Volume 7969, 79691R (2011) https://doi.org/10.1117/12.879428
KEYWORDS: Photomasks, Extreme ultraviolet lithography, Cadmium sulfide, Extreme ultraviolet, Line width roughness, Lithography, Reflection, Electroluminescence, Phase shifting, Semiconducting wafers

Proceedings Article | 18 March 2009 Paper
Manish Chandhok, Sanjay Goyal, Steven Carson, Seh-Jin Park, Guojing Zhang, Alan Myers, Michael Leeson, Marilyn Kamna, Fabian Martinez, Alan Stivers, Gian Lorusso, Jan Hermans, Eric Hendrickx, Sanjay Govindjee, Gerd Brandstetter, Tod Laursen
Proceedings Volume 7271, 72710G (2009) https://doi.org/10.1117/12.814428
KEYWORDS: Extreme ultraviolet, Photomasks, Finite element methods, Reticles, Error analysis, Thin films, Photovoltaics, Data modeling, Distortion, Image registration

Proceedings Article | 18 March 2009 Paper
Proceedings Volume 7271, 727116 (2009) https://doi.org/10.1117/12.814436
KEYWORDS: Photomasks, Extreme ultraviolet lithography, Inspection, Optical lithography, Extreme ultraviolet, Particles, Photoresist materials, Line width roughness, Reticles, Semiconducting wafers

Showing 5 of 7 publications
Conference Committee Involvement (4)
Optical and EUV Nanolithography XXXVIII
24 February 2025 | San Jose, California, United States
Optical and EUV Nanolithography XXXVII
26 February 2024 | San Jose, California, United States
Optical and EUV Nanolithography XXXVI
27 February 2023 | San Jose, California, United States
Optical and EUV Nanolithography XXXV
25 April 2022 | San Jose, California, United States
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