Dr. Songbae Moon Profile

Dr. Songbae Moon

at SAMSUNG Electronics Co Ltd

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Publications (2)

Proceedings Article | 1 October 2013 Paper

A study on the ESD damage of a silicon oxy-nitride hard mask on the chromium surface of PSM blank

Songbae Moon, Heebom Kim, Inkyun Shin, Chanuk Jeon

Proceedings Volume 8880, 88801N (2013) https://doi.org/10.1117/12.2025457

KEYWORDS: Silicon, Photomasks, Chromium, Etching, Silicon films, Capacitors, Optical lithography, Mask making, Oxides, Gases

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Proceedings Article | 11 May 2009 Paper

A new optical measurement method for verifying the exact change of thin films on the QZ blanks with ellipsometer

Songbae Moon, Seong-Yoon Kim, Gyung-Yoon Bang, Byung-Gook Kim, Sang-Gyun Woo, Han-ku Cho

Proceedings Volume 7379, 737913 (2009) https://doi.org/10.1117/12.824315

KEYWORDS: Chromium, Oxides, Optical testing, Thin films, Ellipsometry, Photoresist processing, Photomasks, Atomic force microscopy, Binary data, Transmittance

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