Dr. Shida Tan
Sr Principal Engineer at Intel Corp
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Profile Summary

Dr. Shida Tan is a Senior Principal Engineer in Intel’s Physical Debug Technology Development Group, where she leads cross-industry R&D initiatives and U.S. Government-funded projects focused on advancing semiconductor on-die circuit analysis technologies.

She is widely recognized for her groundbreaking work, including:
• Joint development of the world’s first neon gas field ion source.
• Pioneering ion beam research for circuit edit, failure analysis, fault isolation, and device prototyping.
• Leading the first experimental demonstration of optical trapping of single-walled carbon nanotubes, a widely cited achievement that continues to shape research in the field.

Dr. Tan has authored 130 peer-reviewed publications (with ~1300 citations), holds 8 issued patents (with 5 more pending), and has contributed 3 Intel trade secrets. She has earned multiple prestigious awards and serves in key leadership roles, including:
• Vice President & Program Chair of the International Society of Electron, Photon, Ion Beam Technology, and Nanofabrication (EIPBN)
• Proposal Review Board Member at Lawrence Berkeley National Laboratory
• Industry Liaison for the Semiconductor Research Consortium (SRC)
• Guest Editor of the Journal of Vacuum Science and Technology B

A passionate advocate for diversity in STEM, Dr. Tan founded the Women in Nanotechnology program at EIPBN and mentors women and girls through various initiatives.

She holds a Ph.D. in Materials Science and Engineering with a minor in Electrical Engineering from Auburn University and earned the LEAD Certification from Stanford’s Graduate School of Business. Combining technical expertise with leadership and mentoring, Dr. Tan continues to pioneer advancements in semiconductor technologies.

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