Dr. Sheik Ansar Usman Ibrahim Profile

Dr. Sheik Ansar Usman Ibrahim

at Pall BVBA

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Publications (1)

Proceedings Article | 1 May 2023 Poster + Paper

Defectivity reduction in EUV resists through novel high-performance Point-Of-Use (POU) filters

Yiren Zhang, Toru Umeda, Hirokazu Sakakibara, Sheik Ansar Usman Ibrahim, Atsushi Sakamoto, Amarnauth Singh, Robert Shick, Karl Skjonnemand, Philippe Foubert, Waut Drent

Proceedings Volume 12498, 124981Y (2023) https://doi.org/10.1117/12.2660389

KEYWORDS: Tunable filters, Extreme ultraviolet lithography, Particles, Photoresist materials, Contamination

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