Dr. Shaoren Deng Profile

Dr. Shaoren Deng

at ASM Belgium NV

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Publications (2)

Proceedings Article | 26 March 2019 Presentation + Paper

Localized power spectral density analysis on atomic force microscopy images for advanced patterning applications

Alain Moussa, Mohamed Saib, Sara Paolillo, Frederic Lazzarino, Andrea Illiberi, Shaoren Deng, Jan Willem Maes, Anne-Laure Charley, Philippe Leray

Proceedings Volume 10959, 109591O (2019) https://doi.org/10.1117/12.2515178

KEYWORDS: Atomic force microscopy, Image processing, Photoresist processing, Statistical analysis, Signal processing, Scanning electron microscopy, Optical lithography, Image analysis, Metrology, Algorithm development

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Proceedings Article | 26 March 2019 Presentation + Paper

Scatterometry and AFM measurement combination for area selective deposition process characterization

Mohamed Saib, Alain Moussa, Anne-Laure Charley, Philippe Leray, Joey Hung, Roy Koret, Igor Turovets, Avron Ger, Shaoren Deng, Andrea Illiberi, Jan Willem Maes, Gabriel Woodworth, Michael Strauss

Proceedings Volume 10959, 109591N (2019) https://doi.org/10.1117/12.2515177

KEYWORDS: Zirconium dioxide, Scatterometry, Metrology, Chemical species, Atomic force microscopy, Semiconducting wafers, Deposition processes, Data modeling, Machine learning, Scatter measurement

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