Mr. SeungHyun Lee Profile

SeungHyun Lee

at SK Hynix Inc

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Publications (2)

Proceedings Article | 27 April 2023 Poster + Paper

Tracing optimized condition for electron beam metrology of EUV photoresist pattern using low landing energy

Woosung Jung, Jong-Hoi Cho, SungHun Lim, TaeSeop Lee, DaeYoung Choi, Jong-Hyun Seo, SeungHyun Lee, JunKyoung Lee, You Jin Kim, Jeong Ho Yeo, Alex Brikker, Roi Meir, Ran Alkoken, Kyeongju Han, Sujin Lim, KyungJae Choi, Chanhee Kwak, Hyeon Sang Shin

Proceedings Volume 12496, 1249622 (2023) https://doi.org/10.1117/12.2660118

KEYWORDS: Shrinkage, Photoresist materials, Extreme ultraviolet lithography, Critical dimension metrology, Photoacid generators, Metrology, Extreme ultraviolet, Etching, Electron beams, Outgassing

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Proceedings Article | 27 April 2023 Poster + Paper

Tracing optimized condition for electron beam metrology of EUV photoresist pattern using low-landing energy

Proceedings Volume 12496, 124963E (2023) https://doi.org/10.1117/12.2660114

KEYWORDS: Shrinkage, Photoresist materials, Extreme ultraviolet lithography, Critical dimension metrology, Photoacid generators, Metrology, Electron beams, Etching, Outgassing, Lithography

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