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Seung Yeon Sung
at Park Systems Corp
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Publications (1)
Proceedings Article | 22 November 2023 Presentation
Simultaneous 3d characterization and repair of EUV mask defects
Sang-Joon Cho, Byoung-Woon Ahn, Ah-Jin Jo, Brian Grenon, Yong-Woon Lim, Seung Yeon Sung, Dongchun Lee, Stefan Kaemmer
Proceedings Volume PC12751, PC127510K (2023) https://doi.org/10.1117/12.2688715
KEYWORDS: Extreme ultraviolet, 3D mask effects, Chemical analysis, Shape analysis, Semiconductors, Photomasks, Nanotechnology, Inspection equipment, Industrial chemicals, EUV optics
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