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Scott McLeod
Project Manager/New Product Development at CVI Melles Griot
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Publications (4)
Proceedings Article | 14 May 2007 Paper
Advanced electro-mechanical micro-shutters for thermal infrared night vision imaging and targeting systems
David Durfee, Walter Johnson, Scott McLeod
Proceedings Volume 6542, 65422C (2007) https://doi.org/10.1117/12.736249
KEYWORDS: Camera shutters, Thermography, Imaging systems, Actuators, Iris, Night vision systems, Sensors, Infrared imaging, Microbolometers, Infrared radiation
Proceedings Article | 20 May 2004 Paper
Collimated laser-plasma lithography (CPL) for 90-nm and smaller contacts and vias
Richard Forber, Celestino Gaeta, Heinz Siegert, Scott McLeod, Brent Boerger
Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.534379
KEYWORDS: X-rays, Photomasks, Lithography, X-ray lithography, Collimators, Collimation, Amplifiers, Plasma, Semiconducting wafers, X-ray optics
Proceedings Article | 7 January 2004 Paper
High-power laser-produced plasma source for nanolithography
Richard Forber, Celestino Gaeta, Harry Rieger, Heinz Siegert, Scott McLeod, Brent Boerger
Proceedings Volume 5196, (2004) https://doi.org/10.1117/12.514053
KEYWORDS: X-rays, Extreme ultraviolet, Amplifiers, Lithography, Plasma, Tin, Laser development, Collimation, Collimators, Extreme ultraviolet lithography
Proceedings Article | 16 June 2003 Paper
Advances in CPL, collimated plasma source, and full-field exposure for sub-100-nm lithography
Brent Boerger, Scott McLeod, Richard Forber, I. C. Edmond Turcu, Celestino Gaeta, Donald Bailey, Jacob Ben-Jacob
Proceedings Volume 5037, (2003) https://doi.org/10.1117/12.485436
KEYWORDS: Photomasks, Semiconducting wafers, Lithography, Collimation, X-rays, Plasma, Optical alignment, Photoresist processing, Collimators, Nanolithography
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