Mr. Sam Sivakumar Profile

Sam Sivakumar

Director of Lithography at Intel Corp

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Publications (2)

Proceedings Article | 18 March 2016 Open Access

EUV progress toward HVM readiness

Britt Turkot, Steven Carson, Anna Lio, Ted Liang, Mark Phillips, Brian McCool, Eric Stenehjem, Tim Crimmins, Guojing Zhang, Sam Sivakumar

Proceedings Volume 9776, 977602 (2016) https://doi.org/10.1117/12.2225014

KEYWORDS: Extreme ultraviolet, Reticles, Pellicles, Photomasks, Semiconducting wafers, Extreme ultraviolet lithography, Scanners, Optical lithography, Inspection, Yield improvement

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Proceedings Article | 29 March 2006 Paper

Defect marginality screen for resists patterned in random bright-field layout

David Fryer, Vivek Singh, Andrew Muray, Sushil Dhoot, Sam Sivakumar

Proceedings Volume 6153, 61530U (2006) https://doi.org/10.1117/12.658060

KEYWORDS: Stereolithography, Lithography, Optical lithography, Photomasks, FT-IR spectroscopy, Data modeling, Resolution enhancement technologies, Reticles, Model-based design, Photoresist materials

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Conference Committee Involvement (8)

Optical Microlithography XXVIII

24 February 2015 | San Jose, California, United States

Optical Microlithography XXVII

25 February 2014 | San Jose, California, United States

Optical Microlithography XXVI

26 February 2013 | San Jose, California, United States

Optical Microlithography XXV

14 February 2012 | San Jose, California, United States

Optical Microlithography XXIV

1 March 2011 | San Jose, California, United States

Showing 5 of 8 Conference Committees

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