Mr. Senichi Nishibe Profile

Senichi Nishibe

Research Engineer at KLA Japan

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Publications (1)

Proceedings Article | 2 April 2014 Paper

Spectroscopic critical dimension technology (SCD) for directed self assembly

Senichi Nishibe, Thaddeus Dziura, Venkat Nagaswami, Roel Gronheid

Proceedings Volume 9050, 90502U (2014) https://doi.org/10.1117/12.2046647

KEYWORDS: Single crystal X-ray diffraction, Semiconducting wafers, Critical dimension metrology, Scanning electron microscopy, Etching, Directed self assembly, Scatterometry, Silicon, Inspection, Polymethylmethacrylate

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