Dr. S. J. Neil Mitchell Profile

Dr. S. J. Neil Mitchell

at Queen's Univ Belfast

SPIE Involvement:

Author

Proceedings Article | 3 June 2005 Paper

Quasi-optical beam steering using a MEMS reflector array

V. Srigengan, S. Mitchell, V. Fusco, D. Campbell, D. Linton, H. Gamble

Proceedings Volume 5825, (2005) https://doi.org/10.1117/12.604828

KEYWORDS: Silicon, Antennas, Semiconducting wafers, Reflectors, Oxides, Microelectromechanical systems, Electromagnetic radiation, Polarization, Beam steering, Metals

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SPIE Journal Paper | 1 July 2004

Buried polysilicon hot-wire anemometer with integrated bulk micromachined channel

Hao Zhao, John Montgomery, S. J. Mitchell, Harold Gamble

JM3, Vol. 3, Issue 03, (July 2004) https://doi.org/10.1117/12.10.1117/1.1758726

KEYWORDS: Sensors, Silicon, Semiconducting wafers, Microfluidics, Resistance, Doping, Resistors, Wafer bonding, Chemical elements, Silica

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SPIE Journal Paper | 1 July 2004

Fabrication and characterization of a novel microvalve for microfluidic applications

Daniel Bien, S. J. Mitchell, Harold Gamble

JM3, Vol. 3, Issue 03, (July 2004) https://doi.org/10.1117/12.10.1117/1.1759329

KEYWORDS: Microfluidics, Silicon, Semiconducting wafers, Resistance, Liquids, Control systems, Surface finishing, Silica, Nitrogen

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Proceedings Article | 27 August 2003 Paper

A thermal stack structure for measurement of fluid flow

Hao Zhao, S. J. Mitchell, D. Campbell, Harold Gamble

Proceedings Volume 4876, (2003) https://doi.org/10.1117/12.463631

KEYWORDS: Sensors, Resistance, Silicon, Doping, Microfluidics, Oxides, Temperature sensors, Dielectrics, Temperature metrology, Liquids

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SPIE Journal Paper | 1 July 2002

Optimization of conductivity monitoring in micromachined silicon capillaries

Paul Rainey, S. J. Mitchell, Harold Gamble

JM3, Vol. 1, Issue 02, (July 2002) https://doi.org/10.1117/12.10.1117/1.1479708

KEYWORDS: Silicon, Capillaries, Capacitance, Oxides, Etching, Semiconducting wafers, Dielectrics, Molybdenum, Glasses, Liquids

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SPIE Journal Paper | 1 July 2002

Investigation of precision grinding process for production of silicon diaphragms

Andrzej Prochaska, S. J. Mitchell, Tatiana Perova, Remy Maurice, Paul Baine, Harold Gamble

JM3, Vol. 1, Issue 02, (July 2002) https://doi.org/10.1117/12.10.1117/1.1450597

KEYWORDS: Silicon, Semiconducting wafers, Raman spectroscopy, Wafer bonding, Oxides, Etching, Protactinium, X-rays, Phonons, Finite element methods

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Proceedings Article | 30 April 2001 Paper

SPICE modeling of liquid capacitance in micromachined silicon capillaries

Paul Rainey, S. J. Mitchell, Harold Gamble

Proceedings Volume 4407, (2001) https://doi.org/10.1117/12.425334

KEYWORDS: Silicon, Capacitance, Capillaries, Oxides, Semiconducting wafers, Liquids, Resistance, Glasses, Transistors, Electrodes

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Proceedings Article | 30 April 2001 Paper

Coplanar waveguides on SOI and OPS substrates

Harold Gamble, Kam Leong, Syed Raza, Brian Armstrong, S. J. Mitchell, Suidong Yang, Vince Fusco, Carson Stewart

Proceedings Volume 4407, (2001) https://doi.org/10.1117/12.425323

KEYWORDS: Silicon, Semiconducting wafers, Aluminum, Wafer bonding, Silica, Microwave radiation, Etching, Oxides, Copper, Oxidation

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Proceedings Article | 25 August 2000 Paper

Production of silicon diaphragms by precision grinding

Andrzej Prochaska, Paul Baine, S. J. Mitchell, Harold Gamble

Proceedings Volume 4174, (2000) https://doi.org/10.1117/12.396440

KEYWORDS: Silicon, Finite element methods

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Proceedings Article | 18 August 2000 Paper

Flow-rate measurement via conductivity monitoring in microfluidic devices

Paul Rainey, S. J. Mitchell, Harold Gamble

Proceedings Volume 4177, (2000) https://doi.org/10.1117/12.395659

KEYWORDS: Microfluidics, Liquids, Silicon, Silicon films, Capillaries, Electrodes, Glasses, Measurement devices, Anisotropic etching, Etching

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Showing 5 of 10 publications

Conference Committee Involvement (1)

Photonics Fabrication, Integration, and Packaging

4 April 2005 | Dublin, Ireland

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