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Robert K. Grygier
Vice President, Engineering Management
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Publications (4)
Proceedings Article | 6 December 2001 Paper
Compact high-power laser-plasma x-ray source for lithography
Celestino Gaeta, Harry Rieger, I. C. Edmond Turcu, Richard Forber, S. Campeau, Kelly Cassidy, Michael Powers, Robert Grygier, Juan Maldonado, G. French, Joe Naunguyan, Charles Kelsy, Peter Hark, James Morris, Richard Foster
Proceedings Volume 4502, (2001) https://doi.org/10.1117/12.449863
KEYWORDS: X-rays, X-ray sources, X-ray lithography, Plasma, Semiconducting wafers, Copper, Lithography, Pulsed laser operation, Laser systems engineering, Calibration
Proceedings Article | 2 November 2000 Paper
Microfocus soft x-ray source generated by a compact high-power laser plasma
I. C. Edmond Turcu, Harry Rieger, Yuli Vladimirsky, Robert Grygier, Michael Powers, Joe Naunguyan, S. Campeau, G. French, Richard Forber, Richard Foster
Proceedings Volume 4144, (2000) https://doi.org/10.1117/12.405882
KEYWORDS: X-rays, X-ray sources, Plasma, Copper, X-ray lithography, Pulsed laser operation, Laser systems engineering, X-ray lasers, Helium, Picosecond phenomena
Proceedings Article | 23 November 1999 Paper
High-power x-ray point source for next-generation lithography
I. C. Edmond Turcu, Richard Forber, Robert Grygier, Harry Rieger, Michael Powers, S. Campeau, G. French, Richard Foster, Phillip Mitchell, Celestino Gaeta, Z. Cheng, Jay Burdett, David Gibson, Stephen Lane, Troy Barbee, Stanley Mrowka, Juan Maldonado
Proceedings Volume 3767, (1999) https://doi.org/10.1117/12.371118
KEYWORDS: X-rays, Collimators, Copper, X-ray lithography, Plasma, Semiconducting wafers, X-ray sources, Helium, Semiconductor lasers, Lithography
Proceedings Article | 23 November 1999 Paper
Polycapillary collimator for laser-generated plasma source x-ray lithography
Zewu Chen, Russell Youngman, Tom Bievenue, Qi-Fan Xiao, I. C. Edmond Turcu, Robert Grygier, Stanley Mrowka
Proceedings Volume 3767, (1999) https://doi.org/10.1117/12.371136
KEYWORDS: Collimators, Optical fibers, Plasma, X-ray lithography, X-rays, CCD cameras, Sensors, Information operations, Copper, Silicon
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