Rakesh Kumar Soni
Member Consulting Staff at Mentor Graphics (India) Pvt. Ltd.
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 20 October 2016 Paper
Proceedings Volume 10032, 100320G (2016) https://doi.org/10.1117/12.2250106
KEYWORDS: Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Manufacturing, SRAF, Databases, Inspection, Visualization, Defect inspection, Fabrication

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