Dr. Rajan Beera Profile

Dr. Rajan Beera

Vice President - Technology at Pall Corp

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 22 February 2021 Poster + Presentation

Novel functionalized membrane approaches to metal contamination control in advanced lithography filtration

Hassan Ait-Haddou, James Belmont, Frank Onyemauwa, Takehito Mizuno, Atsushi Hattori, Toru Umeda, Yiren Zhang, Timothy McKeon, Rajan Beera

Proceedings Volume 11612, 116120Z (2021) https://doi.org/10.1117/12.2584752

KEYWORDS: Metals, Lithography, Contamination control, Chemistry, Yield improvement, Semiconductors, Semiconducting wafers, Photoresist materials, Oxides, Nanoparticles

Read Abstract +

Proceedings Article | 22 February 2021 Presentation + Paper

High performance filtration for bulk materials: a novel HDPE membrane filter designed for EUV lithography

Lucia D'Urzo, Toru Umeda, Takehito Mizuno, Atsushi Hattori, Amarnauth Singh, Rajan Beera, Philippe Foubert, Waut Drent

Proceedings Volume 11612, 116120H (2021) https://doi.org/10.1117/12.2584064

KEYWORDS: Extreme ultraviolet lithography, Particles, Molecules, Lithography, Extreme ultraviolet, Semiconducting wafers, Metals, Liquids, Linear filtering, Coating

Read Abstract +

Proceedings Article | 23 March 2020 Presentation + Paper

Defectivity modulation in EUV resists through advanced filtration technologies

Lucia D'Urzo, Toru Umeda, Takehito Mizuno, Atsushi Hattori, Rao Varanasi, Amarnauth Singh, Rajan Beera, Philippe Foubert, Jelle Vandereyken, Waut Drent

Proceedings Volume 11326, 113260K (2020) https://doi.org/10.1117/12.2560144

KEYWORDS: Semiconducting wafers, Particles, Extreme ultraviolet lithography, Extreme ultraviolet, Inspection, Bridges, Defect inspection

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years