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Dr. Qinyuan Deng
at Institute of Optics and Electronics CAS
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Publications (4)
Proceedings Article | 6 February 2019 Paper
Design of bifocal compound eyes and gray mask fabrication based on maskless photolithography
Proceedings Volume 10842, 108421B (2019) https://doi.org/10.1117/12.2505369
KEYWORDS: Optical lithography, Photomasks, Digital micromirror devices, Microlens, Micromirrors
Proceedings Article | 23 August 2017 Presentation + Paper
Dimensional metrology of micro structure based on modulation depth in scanning broadband light interferometry
Proceedings Volume 10373, 103730G (2017) https://doi.org/10.1117/12.2280001
KEYWORDS: Modulation, Dimensional metrology, Interferometry, Integrated circuits, Chemistry
Proceedings Article | 25 October 2016 Paper
Thickness measurement of transparent film by white-light interferometry
Proceedings Volume 9685, 968506 (2016) https://doi.org/10.1117/12.2243601
KEYWORDS: Interferometry, Reflectometry, Thin films, Reflection, Silicon films, Silicon, Optics manufacturing, Beam splitters, Reflectivity, Fourier transforms
Proceedings Article | 25 October 2016 Paper
Topography measurement of micro structure by modulation-based method
Yi Zhou, Yan Tang, Junbo Liu, Qinyuan Deng, Yiguang Cheng, Song Hu
Proceedings Volume 9685, 968505 (2016) https://doi.org/10.1117/12.2243599
KEYWORDS: Modulation, Light sources, Interferometry, Light, Optical interferometry, Scanning tunneling microscopy, CCD cameras, Microfabrication, Confocal microscopy, Imaging systems
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