Pandeng Xuan
at Yangtze Memory Technologies Co Ltd
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 26 May 2022 Poster + Presentation + Paper
Proceedings Volume 12053, 120531I (2022) https://doi.org/10.1117/12.2617698
KEYWORDS: Optical alignment, Optical parametric oscillators, Overlay metrology, Manufacturing, Feedback control, Calibration, Scanners, Process modeling, Performance modeling, Model-based design

Proceedings Article | 22 February 2021 Poster + Presentation + Paper
Proceedings Volume 11611, 116112U (2021) https://doi.org/10.1117/12.2583737
KEYWORDS: Overlay metrology, Optical metrology, Metrology, Lithography, High volume manufacturing, Etching, Diffraction

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11611, 116110V (2021) https://doi.org/10.1117/12.2583416

Proceedings Article | 20 March 2020 Paper
Proceedings Volume 11325, 1132522 (2020) https://doi.org/10.1117/12.2553054
KEYWORDS: Optical metrology, Overlay metrology, Semiconducting wafers, Signal processing, Metrology, Machine learning, Image processing, Optical signal processing, Optics manufacturing

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top