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Olaf T. Janssen
at Technische Univ Delft
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Publications (2)
Proceedings Article | 7 March 2008 Paper
Extended Nijboer-Zernike (ENZ) based mask imaging: efficient coupling of electromagnetic field solvers and the ENZ imaging algorithm
Olaf Janssen, Sven van Haver, Augustus Janssen, Joseph Braat, H. Paul Urbach, Silvania Pereira
Proceedings Volume 6924, 692410 (2008) https://doi.org/10.1117/12.772497
KEYWORDS: Photomasks, Finite-difference time-domain method, Electromagnetism, Interfaces, Lithography, Near field, Diffraction, Algorithm development, Imaging systems, Free space
Proceedings Article | 7 March 2008 Paper
General imaging of advanced 3D mask objects based on the fully-vectorial extended Nijboer-Zernike (ENZ) theory
Sven van Haver, Olaf Janssen, Joseph Braat, Augustus Janssen, H. Paul Urbach, Silvania Pereira
Proceedings Volume 6924, 69240U (2008) https://doi.org/10.1117/12.771872
KEYWORDS: Photomasks, Lithography, Imaging systems, Diffraction, Reticles, Stereoscopy, 3D image processing, Mask making, Image processing, Algorithms
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