In the context of this article we demonstrate a novel Fizeau interferometric system that copes with the presence of
vibrations. Besides the conventional high spatial, but low temporal resolution detector system (the CCD camera) used in
phase shifting interferometry, an additional high temporal, but low spatial resolution detector system was integrated, in
order to measure the random phase shifts that are induced under the influence of the vibrations. The additional sensor
consists of three photodiodes. The acquired analog signals enable the measurement of the occurring phase shifts at three
non-collinear locations on the test surface. Under the assumption of the rigid body shifts and tilts of the test object, the
resulting phase shifts at the three individual locations enable the determination of the random phase shifts over the entire
image aperture. While the random oscillations of the test object are continuously measured, the CCD camera acquires
several interferograms. In consequence, a phase shifting algorithm for random phase shifts was applied. In order to prove
the validity of the new interferometer, a test surface of known topography was measured. The results of the
measurements in presence of vibrations show very good concordance with the surface data given by the supplier. The
analysis of the root mean square (RMS) over ten different measurements shows a measurement repeatability of about
0.004 waves (approximately 2.5 nm for 632.8 nm laser wavelength).
In the context of this article we demonstrate a novel Fizeau interferometric system that copes with the presence of
vibrations. Besides the conventional high spatial, but low temporal resolution detector system (the CCD camera) used in
phase shifting interferometry, an additional high temporal, but low spatial resolution detector system was integrated, in
order to measure the random phase shifts that are induced under the influence of the vibrations. The additional sensor
consists of three photodiodes. The acquired analog signals enable the measurement of the occurring phase shifts at three
non-collinear locations on the test surface. The resulting phase shifts at the three individual locations enable the
determination of the random phase shifts over the entire image aperture. To avoid the smear phenomenon at very short
exposure time, a beam shutter was integrated. Another alternative is to integrate a pulsed laser diode, for this purpose the
concept of a wavelength meter is proposed. While the random oscillations of the test object are continuously measured,
the CCD camera acquires several interferograms. In consequence, a phase shifting algorithm for random phase shifts was
applied. In order to proof the validity of the new interferometer, a test surface of known topography was measured. The
results of the measurements in presence of vibrations show very good concordance with the surface data given by the
supplier. The analysis of the root mean square (RMS) over ten different measurement show a measurement repeatability
of about 0.004 waves (approximately 2.5 nm for 632.8 nm laser wavelength).
This paper presents the concept and the experimental setup of an interferometric system that is designed to work without vibration isolation and uses the random mechanical vibrations as phase shifter. An additional high temporal resolution detector system consisting of three photodiodes is used for the determination of the phase shifts that occur at the recording of the interference images. Two orthogonally polarized laser beams of different wavelengths, a continuous He-Ne laser and a pulsed laser diode, are coupled and expanded to the test and reference plates. To resolve the ambiguity problem of the profile orientation, additional information is obtained from the signals of two adjacent optical fibers placed in the He-Ne interference field. The laser beams are also split and expanded to a plate with tilted surfaces. The fringes that occur at the reflection on the surfaces are used to analyze the wavelength stability of the laser diode, taking the He-Ne wavelength as reference. An adequate PSI algorithm for random phase shifts is proposed.
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