Na Cai
Sr. Process Integration Enginner at GlobalFoundries
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 12 April 2016 Paper
Na Cai, Xuefeng Zeng, Kevin Wu, Ho Young Song, Weihong Gao, Qing Tian, Chris Lei, Kewen Gao, Liuchen Wang, Yan Zhao
Proceedings Volume 9778, 977834 (2016) https://doi.org/10.1117/12.2218887
KEYWORDS: Inspection, Scanning electron microscopy, Copper, Semiconducting wafers, Defect inspection, Optical inspection, Back end of line, Chemical mechanical planarization, Electrons, Wafer inspection

Proceedings Article | 25 March 2016 Paper
Weihong Gao, Xuefeng Zeng, Peter Lin, Yan Pan, Ho Young Song, Hoang Nguyen, Na Cai, Zhijin Chen, Khurram Zafar
Proceedings Volume 9778, 97783Q (2016) https://doi.org/10.1117/12.2235347
KEYWORDS: Inspection, Optical proximity correction, Image classification, Semiconductors, Virtual colonoscopy, Diffusion, Metals, Data analysis, Failure analysis, Defect inspection, Ions, Electron beams, Defect detection, Back end of line

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top