Dr. Mingtao Li Profile

Dr. Mingtao Li

Application Manager at Nanonex Corp

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Publications (2)

Proceedings Article | 20 May 2004 Paper

Current status of Nanonex nanoimprint solutions

Hua Tan, Linshu Kong, Mingtao Li, Colby Steere, Larry Koecher

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.537241

KEYWORDS: Nanoimprint lithography, Photomasks, Semiconducting wafers, Optical alignment, Lithography, Ultraviolet radiation, Nanostructures, Nanotechnology, Optical lithography, Manufacturing

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Proceedings Article | 20 May 2004 Paper

Four-inch photocurable nanoimprint lithography using NX-2000 nanoimprinter

Mingtao Li, Hua Tan, Linshu Kong, Larry Koecher

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.537232

KEYWORDS: Nanoimprint lithography, Reactive ion etching, Semiconducting wafers, Photoresist processing, Oxygen, Ultraviolet radiation, Electron beam lithography, Lithography, Silicon, Patents

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