Dr. Minfeng Chen Profile

Dr. Minfeng Chen

at Taiwan Semiconductor Manufacturing Company, Ltd.

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Publications (1)

Proceedings Article | 15 March 2016 Paper

Inverse polarizer on immersion lithography mask

Minfeng Chen, Shuo-Yen Chou, Chun-Kuang Chen, Ru-Gun Liu, Tsai-Sheng Gau

Proceedings Volume 9780, 97801R (2016) https://doi.org/10.1117/12.2225127

KEYWORDS: Diffraction, Photomasks, Polarizers, Dielectric polarization, Image quality, Polarization, Transmittance, Immersion lithography, Lithography, Diffraction gratings

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