Mr. Mark D. Boerema Profile

Mark D. Boerema

Applications Engineer at ASML Netherlands BV

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Publications (2)

Proceedings Article | 22 February 2021 Presentation + Paper

Recent advancements in atomic force microscopy

M. van Reijzen, M. Boerema, A. Kalinin, H. Sadeghian, C. Bozdog

Proceedings Volume 11611, 116112E (2021) https://doi.org/10.1117/12.2595426

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Proceedings Article | 15 March 2006 Paper

A dive into clear water: immersion defect capabilities

B. Streefkerk, J. Mulkens, R. Moerman, M. Stavenga, J. van der Hoeven, C. Grouwstra, R. Bruls, M. Leenders, S. Wang, Y. van Dommelen, M. Boerema, H. Jansen, K. Cummings, M. Riepen, H. Boom, M. Suddendorf, P. Huisman

Proceedings Volume 6154, 61540S (2006) https://doi.org/10.1117/12.660376

KEYWORDS: Particles, Thin film coatings, Semiconducting wafers, Scanners, Curtains, Photoresist processing, Scanning electron microscopy, Immersion lithography, Lithography, Manufacturing

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