Dr. Marc D. Himel
Director Inside Sales
SPIE Involvement:
Engineering, Science, and Technology Policy Committee | Author | Prism Awards Judge | Startup Challenge Judge | Startup Challenge Judge | Startup Challenge Judge | Career Lab Leader
Area of Expertise:
lithographic illumination , Leadership , applications of micro-optics , project management , management of technology
Websites:
Profile Summary

Dr. Himel, an SPIE Fellow since 2010, received his BS degree in Physics from the California Polytechnic State University in 1984, his PhD in Optical Sciences from the University of Arizona in 1988, and an MBA from the University of Connecticut in 1998. Following his PhD, Dr. Himel worked as a Post Doctoral Research Associate at the Center for Research in Electro-Optics and Lasers at the University of Central Florida performing research on the characterization of thin-film coatings. For 14 years, he worked in the design and development of advanced lithography systems starting with three years at AT&T Bell Laboratories working on the development of Extreme Ultraviolet Lithography, followed by five years at SVG Lithography Systems working on excimer laser-based illumination systems, and eighteen years at DigitalOptics Corporation and Jenoptik Optical Systems where he concentrated his efforts on the application of diffractive micro-optics for advanced lithography, inspection, and consumer applications. Dr. Himel is currently the Senior Director of Design and Engineering at MKS Instruments - Newport Corporation. His research and development activity has resulted in over 46 published papers and five patents.
Visiting Lecture Topics

• Harnessing Light for a Better World
Publications (15)

Proceedings Article | 4 March 2010 Paper
James Carriere, Jared Stack, John Childers, Kevin Welch, Marc Himel
Proceedings Volume 7640, 764025 (2010) https://doi.org/10.1117/12.846619
KEYWORDS: Diffractive optical elements, Source mask optimization, Performance modeling, Stray light, Lithography, Lithographic illumination, Manufacturing, Scanners, Ions, Speckle

Proceedings Article | 16 February 2010 Paper
Proceedings Volume 7591, 75910W (2010) https://doi.org/10.1117/12.837165
KEYWORDS: Beam shaping, Tolerancing, Diffractive optical elements, Collimation, Gaussian beams, Optical simulations, Wavefronts, Optical alignment, Optical components, Stray light

Proceedings Article | 22 August 2009 Paper
John Childers, Tom Baker, Tim Emig, James Carriere, Marc Himel
Proceedings Volume 7430, 74300S (2009) https://doi.org/10.1117/12.827395
KEYWORDS: Sensors, Stray light, Lithographic illumination, Imaging systems, Cameras, Excimers, Diffractive optical elements, Optical testing, Tolerancing, Optical lithography

Proceedings Article | 16 March 2009 Paper
Proceedings Volume 7274, 72740B (2009) https://doi.org/10.1117/12.814215
KEYWORDS: Diffractive optical elements, Photomasks, Manufacturing, Nanoimprint lithography, Source mask optimization, SRAF, Lithographic illumination, Model-based design, Image processing, Lithium

Proceedings Article | 7 March 2008 Paper
Proceedings Volume 6924, 69242O (2008) https://doi.org/10.1117/12.774666
KEYWORDS: Diffractive optical elements, Diffusers, Lithography, Lithographic illumination, Critical dimension metrology, Optics manufacturing, Semiconductors, Photomasks, Custom fabrication, Etching

Showing 5 of 15 publications
Conference Committee Involvement (4)
Digital Optics for Immersive Displays (DOID18)
24 April 2018 | Strasbourg, France
Laser Beam Shaping XVII
29 August 2016 | San Diego, California, United States
Laser Beam Shaping XVI
10 August 2015 | San Diego, California, United States
Laser Beam Shaping XV
17 August 2014 | San Diego, California, United States
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