Dr. Luke Lin Profile

Dr. Luke Lin

at ASML

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Publications (1)

Proceedings Article | 26 May 2022 Presentation + Paper

Ultra-high throughput e-beam inspection for DRAM high aspect ratio storage node defect detection

Tsewen Huang, Shueming Chen, Kevin Hsiao, Steve Lin, Ray Fei, Yufei Duan, Kevin Gao, Luke Lin, Selena Chen

Proceedings Volume 12053, 120530J (2022) https://doi.org/10.1117/12.2617685

KEYWORDS: Defect detection, Inspection, Transmission electron microscopy, Signal detection, Sensors, Semiconducting wafers, Scanning electron microscopy, Defect inspection, Data storage

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